IDP-10 Dry Scroll Vacuum Pump

IDP-10 Dry Scroll Vacuum Pump


IDP-10 Dry Scroll Vacuum Pump

Agilent IDP10, IDP-10 Hermetically-Sealed Dry Scroll Vacuum Pump

The new Agilent Varian IDP-10 dry scroll vacuum pump is designed for extremely quiet < 55 dBA and low vibration operation, delivering a peak pumping speed of 6.0 cfm (10.2 m3/h) at 60 Hz, and produces an ultimate pressure of 20 mTorr. A DSUB9 connector allows remote switching on/off of the pump as well as fine tuning of pump speed between 1350 and 1900 RPM. These new Agilent IDP-10 dry scroll pumps are hermetically-sealed and are appropriate for helium recirculation as well as vacuum oven, and backing pump applications. The hermetic design provides a clean gas path through the pump, which eliminates any risk of oil or grease contamination allowing the motor and bearings to run at atmospheric pressure, isolating them from exposure to vacuum process gases or water vapor. The Agilent IDP-10 supports a global single-phase motor for operating voltages ranges easily switched between 100-120V or 200-230 VAC at 50/60Hz. 

This IDP-10 model, Agilent technologies part number X3810-64010, contains an Integrated Inlet Isolation Valve which protects against backward migration of air through the scroll pump inlet if the IDP-10 loses power. This isolation valve prevents sudden venting of customer's chamber or instrument on system power loss. There is no additional height to the pump body as this isolation valve is built into the pump module; both of the IDP-10 models are identical in size. 

High vacuum pumps, such as turbo molecular pumps, are increasingly used in conjunction with dry backing pump technology. Pumps based on scroll technology have become the dry pump technology of choice for backing turbo molecular high vacuum pumps. There are several factors that make these Agilent Varian IDP-10 scroll technology the superior dry pump choice, including clean, predictable performance, lower vibration and noise, and long service life. 

Modern Agilent IDP-10 scroll technology is based on smooth orbital operation; the vacuum pump cycle of gas compression and discharge occurs with minimal pulsation and very low vibration. Depending on the application, vibration can have adverse effects, and may necessitate the use of additional components such as vibration isolators. The new Agilent IDP-10 is the dry pump of choice in a wide variety of applications where excessive vibration is unacceptable. 

Current scroll pump technology and tip seal design are factors that work together to provide low base pressure, and a gradual increase in base pressure over the service life. This gradual increase in base pressure allows maintenance to be done before the vacuum levels become unacceptable and cuts unscheduled downtime. A typical scroll pump like the Agilent IDP-10 will achieve a base pressure of 20 mTorr. 

These Agilent IDP-10 dry scroll pumps create vacuum using a simple dual scroll mechanism in which one of the nested scrolls orbits about the other, creating moving zones of captured gas. Gas enters the scroll set at the outside perimeter and is displaced and compressed toward the center of the hub where it is exhausted. The uncomplicated dual scroll design offers many benefits including lower noise and vibration levels, simple and infrequent maintenance requirements, plus the elimination of catastrophic failure modes. 

These new Agilent Technologies IDP-10 includes improved solid tip seals for longer tip seal life and longer service interval. The solid tip seal material performs well for condensable vapor applications. The tip seal replacement for the IDP-10 is easier than ever before. In addition to a tip seal kit (X3807-67000), a few simple tools are all that is required to replace a worn tip seal: a flat head screw driver, 4 and 5 mm Allen wrenches, isopropyl alcohol, a few lint-free wipes. Please see pages 22 - 24 of the instruction manual for tip seal replacement procedure. An instruction manual and brochures in PDF format for the new Agilent IDP-10 hermetically-sealed dry scroll vacuum pumps can be downloaded in our available download section below.

  • Government Research Labs
  • University Labs
  • High Energy Physics/Beam Lines


  • Glovebox
  • Crystal Pulling
  • LED/Light Manufacturing
  • Freeze Drying
  • Gel Drying
  • Sample Preparation
  • Laser evacuation
  • Cryogenic dewars
  • Gas recovery and recirculation
  • Cryopump roughing
  • Vacuum chucks

  • Cryogenics
  • Electron Microscope
  • Helium Recirculation
  • Leak Detectors
  • Mass Spectrometry
  • Ion Implant
  • Leak Detection
  • Surface Science Instruments
  • Residual gas analyzers
  • Load locks for mass spectrometers
  • Electron microscopes
  • Surface area analyzers
  • EM Sample prep coaters


  • Gas panels
  • Gas delivery systems
  • Double wall containment vessels