IDP-3
The IDP-3 operates at a pumping speed of 60 liters/min.
Features
- Oil-free
- Powerful
- Pumping speed 60 liters/minute
- High performance
- Cost-efficient dry vacuum
- Low noise and vibration levels
- Infrequent, low-cost maintenance
- Easy integration into any system
Technical Specifications
| Peak pumping speed (60 Hz) | 60 L/m, 3.6 m³/hr, 2.1 cfm |
| Peak pumping speed (50 Hz) | 50 L/m, 3.0 m³/hr, 1.8 cfm |
| Ultimate pressure | 2.5 × 10-1 torr (3.3 × 10-1 mbar, 33 Pa) |
| Maximum inlet pressure | 1 atm (0 psig) |
| Maximum outlet pressure | 1.4 atm (6.5 psig) |
| Exhaust connection | 1⁄4-in. female nat’l pipe thread (10 mm hose barb provided) |
| Exhaust connection adapter | NW16 KF adapter provided |
| Gas ballast connection | 1⁄8-in. female nat’l pipe thread |
| Ambient operating temp | 5 to 40 °C (41 to 104 °F) |
| Storage temperature | –20 to 60 °C (–4 to 140 °F) |
| Motor rating | 0.16 horsepower (0.12 kW) |
| Motor thermal protection | Automatic |
| Rotation speed | 60 Hz: 3200 RPM; 50 Hz: 2600 RPM; 24V DC: variable speed, factory setting: 3200 RPM |
| Cooling | Air-cooled |
| Weight | 9.5 kg (21 lbs) Ship: 10.5 kg (23 lbs) |
| Restrictions | No corrosive, explosive, particulate-forming gas |
| Leak rate (exhaust sealed) | <1 × 10-6 std-cc/sec helium |
| Noise level (ISO 11201) | 55 dB(A) |
| Vibration at inlet (ISO 11201) | 1.5 mm/sec |
| Compliance | CE, CSA, CSA/CUS, Semi S2-703, RoHS |
Pumping Speed Graph

Outline Drawing

| IDP-3 Pump,1, 50/60 Hz | With Isolation Valve | Tip Seal Kit | Replacement Module | |
| 220V | IDP3A01 | IDP3A21 | IDP3TS | IDP3 |
| 115V | IDP3B01 | IDP3B21 | ||
| 100V | IDP3C01 | IDP3C21 | ||
| 24 VDC | IDP3D01 | IDP3D21 | ||
| Power Cord Selection | ||||
| Europe, 10 A, 220-230 VAC, 2.5 meter | 656494220 | |||
| Denmark, 10 A, 220-230 VAC, 2.5 meter | 656494225 | |||
| Switzerland, 10 A, 230 VAC, 2.5 meter | 656494235 | |||
| UK/Ireland, 13 A, 230 VAC, 2.5 meter | 656494250 | |||
| India, 10 A, 220-250 VAC, 2.5 meter | 656494245 | |||
| Israel, 10 A, 230 VAC, 2.5 meter | 656494230 | |||
| Japan, 12 A, 100 VAC, 2.3 meter | 656494240 | |||
| North America, 15 A, 125 VAC, 2.0 meter | 656458203 | |||
| North America, 10 A, 230 VAC, 2.5 meter | 656494255 | |||