All-Metal UHV Valves Series 54
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Agilent is pleased to offer Series 54 All-Metal Ultra High Vacuum Valves in partnership with VAT. These valves are specially designed for use in ultra-high vacuum systems where bake-out temperatures up to 300º C preclude the use of elastomers and low melting temperature metals. The valves are manually operated with a standard Hex wrench, so no Torque Wrench is required. Thanks to the “hard-on-hard” metal seals, these valves can be operated thousands of times before requiring maintenance. Series 54 valves require very little maintenance with maximum reliability and vacuum sealing from atmospheric pressure to below 10-11 torr (mbar).
Description UHV All Metal Valves Part Number Valve, ¾ Metal/Mini CFF X3202-60097 Valve, All-Metal, 1 ½”, RT-Angle X3202-60098 Spare Parts Part Number Seal Kit, 1st Replacement, UHV Series 54, ¾” X3202-60107 Seal Kit, 2nd Replacement, UHV Series 54, ¾” X3202-60109 Seal Kit, 1st Replacement, UHV Series 54, 1½” X3202-60108 Seal Kit, 2nd Replacement, UHV Series 54, 1½” X3202-60110
- Fully metal valves designed specifically for Ultra-High Vacuum (UHV)
- Compatible with pressures from XHV up to 2 bar
- Bakeable up to 300 Degrees C in open and closed position
- Unique VATRING seal provides "hard on hard" contact seal, giving more than 1000 closures before maintenance
- May be mounted in any orientation
- Visual position indication
| Leak rate: valve body, valve seat | < 1 x 10-10 mbar Is-1 |
| Pressure range | XHV to 2 bar (abs) |
| Differential pressure on the gate | ≤ 2 bar |
| Differential pressure at opening | ≤ 1 bar 1 |
| Lifetime | ≥ 1000 cycles |
| Bake-out temperature 2 | ≤ 300 °C open and closed |
| Heating and cooling rate | = 60 °C h-1 |
| Material: valve body, mechanism, bellows | AISI 316L (1.4404, 1.4435) |
| Seal: bonnet, plate | metal |
| Feedthrough | bellows |
| Mounting orientation | any |
| Valve position indication | visual (mechanical) |
| Conductance (molecular flow) | NW 16: 5 ls-1 / NW 40: 50 ls-1 |
| Closing force | closes at a mechanical stop |
| Weight: kg (lbs) |
NW 16: 0.4 (0.9)
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1) > 1 bar with reduced number of cycles
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Description UHV All Metal Valves Part Number Valve, ¾ Metal/Mini CFF X3202-60097 Valve, All-Metal, 1 ½”, RT-Angle X3202-60098 Spare Parts Part Number Seal Kit, 1st Replacement, UHV Series 54, ¾” X3202-60107 Seal Kit, 2nd Replacement, UHV Series 54, ¾” X3202-60109 Seal Kit, 1st Replacement, UHV Series 54, 1½” X3202-60108 Seal Kit, 2nd Replacement, UHV Series 54, 1½” X3202-60110
