ELSO Technologies Sdn Bhd
8E, First Floor,
Jalan Tun Dr. Awang,
Bukit Jambul,
11900 Bayan Lepas,
Penang, Malaysia.
+604-6301166
+604-6301167
+604-6301168
sales@elsotech.com

Mr Kwang (General Manager)
+6016-422 8644
 
+60164228644

Johor Branch
Lake View Apartment,
Jalan Austin Perdana 1,
Taman Austin Perdana,
81100 Johor Bahru,
Johor, Malaysia.

Chong CW (Sales Manager)
+6012-4767747
cwchong@elsotech.com

Selangor Branch
Puchong, Selangor.

Glenys Teoh (Sales Manager)
+6018-2810168
glenysteoh@elsotech.com

East Malaysia Branch
Lot 35, Lot 5277,
Lorong 9C1, Jalan Kapor,
93150 Kuching,
Sarawak, Malaysia.

Clement Lau (Sales Engineer)
+6019-8497663
clementlau@elsotech.com

ELSO Technologies Pte Ltd
Singapore Branch

1 Coleman Street
#10-06 The Adelphi
179803 Singapore.

Chew Peng Seng  (Sales Manager)
+65 9663 8176
pengseng@elsotech.com

FRG-702 Pirani Inverted Magnetron Gauge

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FRG-702 Pirani Inverted Magnetron Gauge Vacuum Measurement Agilent Technologies


The Agilent FRG-700 Gauge is a full range gauge that provides two measuring technologies in a single, compact and economical package to measure process and base pressure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere). The single, compact unit with one logarithmic analog output signal, significantly reduces the complexity of installation, setup and integration. The benefits are reduced cost and a marked reduction in valuable space requirements. The FRG-702 is the all-metal version of the FRG-700, incorporating a metal-sealed feedthrough. It can be operated at higher temperatures (max. 150º C at flange) than the FRG-700 (max. 55º C at flange).
  • Provides 2 measuring technologies in a single, compact, economical package
  • Measures process and base pressure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere)
  • A single, compact unit with one logarithmic analog output signal significantly reduces the complexity of installation, setup and integration
  • Ideal for high vacuum pressure monitoring, base pressure for evaporation and sputtering systems, and general vacuum measurement and control in the medium and high vacuum range
  • Wide measurement range from 5 x 10-9 mbar to atmosphere
  • No filament to burn out
  • Excellent ignition properties
  • Easy to clean
FRG-700/702 Full-Range Gauge Tubes
Measurement range 5 x 10-9 to 1000 mbar (3.8 x 10-9 to 760 Torr)
Accuracy ± 30 % of reading, typical
Repeatability ± 5 % of reading, typical
Mounting orientation Any
Admissible temperature (ambient) Operation Storage Bake-out* (Pirani) Filament Temperature
5 to 55 °C –40 to +65 °C 150 °C 120 °C
Supply voltage At gauge Ripple Power consumption
15 to 30 VDC ≤1 Vpp ≤2 W
Output signal (measurement signal) Voltage range Measurement range
0 to 10.5 V 1.82 to 8.6 V
Voltage vs. pressure 0.6 V/decade, logarithmic
Error signal <0.5 V (no supply), >9.5 V (Pirani sensor, filament rupture)
Minimum loaded impedance 10 kΩ, short-circuit proof
Response time <10 ms (@ p> 10-6 mbar), ≈1000 ms (@ p= 10-8 mbar)
Identification gauge 85 kΩ, referenced to supply common
Status Pirani-only mode Combined Pirani/cold cathode mode LED
0 V (low) 15 V to 30 (high) LED green high voltage on
Electrical connection FCC 68 appliance connector, 8 poles, female
Sensor cable 8 poles plus shielding
Maximum cable length ≤ 50 m
Operating voltage/current ≤3.3 kV/≤500 A
Materials exposed to vacuum SS, Al2O3, FPM75, Mo, Ni, Au, W
Internal volume ≈ 20 cm3
Weight DN 25 ISO-KF ≈700g, DN 40 CF ≈980g
Standards EN 61000-6-2, EN 61000-6-3, EN 61010-1
Outline Drawing
FRG-700 Series Pirani Inverted Magnetron Gauge Outline Drawing

Product Number: FRG702KF25

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