ELSO Technologies Sdn Bhd
8E, First Floor,
Jalan Tun Dr. Awang,
Bukit Jambul,
11900 Bayan Lepas,
Penang, Malaysia.
+604-6301166
+604-6301167
+604-6301168
sales@elsotech.com

Mr Kwang (General Manager)
+6016-422 8644
 
+60164228644

Johor Branch
Lake View Apartment,
Jalan Austin Perdana 1,
Taman Austin Perdana,
81100 Johor Bahru,
Johor, Malaysia.

Chong CW (Sales Manager)
+6012-4767747
cwchong@elsotech.com

Selangor Branch
Puchong, Selangor.

Glenys Teoh (Sales Manager)
+6018-2810168
glenysteoh@elsotech.com

East Malaysia Branch
Lot 35, Lot 5277,
Lorong 9C1, Jalan Kapor,
93150 Kuching,
Sarawak, Malaysia.

Clement Lau (Sales Engineer)
+6019-8497663
clementlau@elsotech.com

ELSO Technologies Pte Ltd
Singapore Branch

1 Coleman Street
#10-06 The Adelphi
179803 Singapore.

Chew Peng Seng  (Sales Manager)
+65 9663 8176
pengseng@elsotech.com

Turbo-V 3K-G

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Turbo-V 3K-G Turbo Pumps Agilent Technologies


The Turbo-V 3K-G Turbomolecular Pump (like V 2K-G) is more than a pump. It is a dedicated pumping system, designed specifically for the plasma process industry. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon gas and very high temperatures. Additionally, it features built-in control electronics, an integrated vent and purge valve, and maintenance-free bearings. All of these assets make the Agilent Turbo-V 3K-G Turbomolecular Pump the optimum pumping solution for the coating industry.
  • The only truly "integrated" system on the market
  • Highest pumping speeds in its class
  • Oil-free, robust and reliable
  • MTTF of more than 200,000 hours
  • Leading edge rotor design provides significant reduction in weight and mechanical stress
  • Patented rotor-shaft fitting eliminates rotor tensile stress

Tech Specs

 

Pumping speed With ISO 250F: N2: 2200 l/s
Ar: 2050 l/s
He: 1900 l/s
Compression ratio N2: >1 x 107
Ar: >1 x 108
He: 6 x 103
Throughput (sccm) >1400 for Nitrogen
Base pressure (mbar) <10-8
Inlet flange ISO 250F
Foreline flange KF40 NW
Rotational speed 31800 RPM
Start-up time < 6 minutes
Foreline pressure < 0.5 mbar
Recommended forepump > 60m3/h (depending on gas flow requirements)
Operating position Any
Cooling methods Water
Weight 52Kg

Ordering Information

Description Part Number
Turbo-V 3K-G Pumping Systems
Turbo-V 3K-G ISO 250 F System with MoniTorr and integrated purge/vent device 969-8888
Turbo-V 3K-G ISO 250 F System with MoniTorr and Profibus and integrated purge/vent device 969-8889
(*) Pumping Systems include Pump with 230V Integrated Electronics, Inlet Screen installed on the pump, separate center-ring and pre-installed IP54 Mating Connectors. Both standard models are equipped with Varian s MoniTorr device. 120VAC units available on request
Accessories
Mains cable NEMA Plug, 3m long 969-9958
Mains cable European Plug, 3m long 969-9957
T-Plus Software and serial cable 969-9883
Water cooling kit for 6x8 (IDxOD) flexible tube 969-9348
Water cooling kit for 3/8 in.ID flexible tube 969-9338
Spare Parts
IP54 proof mating connectors 969-8960
Inlet screen ISO 250 969-9350
Centering ISO250 969-9144
 

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