ELSO Technologies Sdn Bhd
8E, First Floor,
Jalan Tun Dr. Awang,
Bukit Jambul,
11900 Bayan Lepas,
Penang, Malaysia.
+604-6301166
+604-6301167
+604-6301168
sales@elsotech.com

Mr Kwang (General Manager)
+6016-422 8644
 
+60164228644

Johor Branch
Lake View Apartment,
Jalan Austin Perdana 1,
Taman Austin Perdana,
81100 Johor Bahru,
Johor, Malaysia.

Chong CW (Sales Manager)
+6012-4767747
cwchong@elsotech.com

Selangor Branch
Puchong, Selangor.

Glenys Teoh (Sales Manager)
+6018-2810168
glenysteoh@elsotech.com

East Malaysia Branch
Lot 35, Lot 5277,
Lorong 9C1, Jalan Kapor,
93150 Kuching,
Sarawak, Malaysia.

Clement Lau (Sales Engineer)
+6019-8497663
clementlau@elsotech.com

ELSO Technologies Pte Ltd
Singapore Branch

1 Coleman Street
#10-06 The Adelphi
179803 Singapore.

Chew Peng Seng  (Sales Manager)
+65 9663 8176
pengseng@elsotech.com

VHS-6

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VHS-6  Diffusions Pumps Agilent Technologies


Available in 4-inch, 6-inch, 250-mm, 10-inch, and 400-mm sizes, the VHS series pumps are the fastest and cleanest diffusion pumps of their size available today. The VHS series patented Bulge Contour doubles gas capture and maintains lower pressure. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging pumping fluid life. Full thermal protection and quick-cool coils are also standard. The 4-inch, 6-inch, and 10-inch pumps can be ordered with ASA or ISO flanges, standard or extended cold caps, and a variety of voltages.
  • Highest pumping speed available.
  • Fluid-level sight glass provides a quick indication of pump fluid status at all times.
  • Fill and drain assembly for pump oil.
  • Fractionating jet purifies pumping fluid.
  • High tolerable forepressure.
  • Full thermal protection.
  • Stainless steel pump body and jet.
  • Finned boiler increases surface area, prolonging pumping fluid life.
Technical Specifications
 
Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963) 1,550 l/s Air, 1,930 l/s He/H2 2,400 l/s Air
Maximum Throughput 2.4 T-l/s (3.2 mbar-l/s) in operating range, 3.5 T-l/s (4.5 mbar-l/s) @ 0.01 torr
Operating Range 1.5 x 10-3 to <5 x 10-9 torr (2 x 10-3 to < 6.5 x 10-9 mbar)
Maximum Forepressure No Load: 0.65 torr (0.85 mbar) Full Load: 0.55 torr (0.72 mbar)
Recommended Backing Pump ≥17 cfm (29 m3/hr)
Backstreaming Rate, Standard Cold Cap <5 x 10-4 mg/cm2/min
Warmup Time 10 minutes
Cooldown Time 10 minutes (with quick cool coil)
Fluid Charge 500 cc – exact fluid charge available
Electrical Requirements 1 ph, 50/60 Hz, 120/208/240 VAC
Pump Power 2200 watts
Cooling Water Requirements 0.25 gpm (50 l/hr) at 60-80°F (15-26°C)
Water Connections 1⁄8 in. FPT Tee

Speed Curve Graph
VHS-6 Diffusion Pump Speed Curve Graph
Pumping Speed/Standard Cold Cap Pumping speed/Extended Cold Cap Throughput

Outline Drawing
VHS-6 Outline Drawing
Description Weight kg (lbs) Part Number
VHS-6 Pump with standard cold cap
120 V with ASA flanges 34.0 (75.0) 85826301
120 V with ISO flanges 34.0 (75.0) L6193301
120 V with ConFlat Flanges 34.0 (75.0) L6200301
208 V with ASA flanges 34.0 (75.0) 85826306
208 V with ISO flanges 34.0 (75.0) L6193306
208 V with ConFlat Flanges 34.0 (75.0) L6200306
240 V with ASA flanges 34.0 (75.0) 85826302
240 V with ISO flanges 34.0 (75.0) L6193302
240 V with ConFlat Flanges 34.0 (75.0) L6200302
VHS-6 Pump with extended cold cap
120 V with ASA flanges 34.0 (75.0) 85826311
120 V with ISO flanges 34.0 (75.0) L6193311
120 V with ConFlat Flanges 34.0 (75.0) L6200311
208 V with ASA flanges 34.0 (55.0) 85826316
208 V with ISO flanges 34.0 (75.0) L6193316
208 V with ConFlat Flanges 34.0 (75.0) L6200316
240 V with ASA flanges 34.0 (75.0) 85826312
240 V with ISO flanges 34.0 (75.0) L6193312
240 V with ConFlat Flanges 34.0 (75.0) L6200312
Accessories
336 water-cooled baffle with ASA flanges 7.0 (15.0) F8277306
336 water-cooled baffle with ISO flanges 7.0 (15.0) F8277307
336 water-cooled baffle with ConFlat Flanges 7.0 (15.0) F8277308
Santovac 5 pump fluid, 500 cc (exact pump charge) 1.1 (2.5) 695405005
DC-702 pump fluid, 500 cc (exact pump charge) 1.4 (3.0) 695472005
DC-704 pump fluid, 500 cc (exact pump charge) 1.4 (3.0) 695474005
DC-705 pump fluid, 500 cc (exact pump charge) 1.4 (3.0) 695475005
Centering ring for ISO inlet flange, 200K 0.5 (1.0) IC200SV
Centering ring for ISO foreline flange, KF50 0.2 (0.5) KC50SV
Instruction manual   699901022
Replacement Parts
Heater, 120 V 2200 W (one required per pump) 0.5 (1.0) 647306125
Heater, 208 V 2200 W (one required per pump) 0.5 (1.0) 647306175
Heater, 240 V 2200 W (one required per pump) 0.5 (1.0) 647306225
Heater clamping assembly (includes clamping plate, cover plate, insulator) 86643301
Heater clamping plate (one required per pump) 0.5 (1.0) 86086301
Heater cover plate (one required per pump) 1.0 (2.0) 86088001
Heater (one required per pump) 0.2 (0.5) 86087001
Replacement nickel heater wire 0.5 (1.0) 656179100
O-ring kit, 3 for inlet (butyl, 2-267), 3 for foreline (butyl, 2-232), 10 for fill and drain (Viton, 2-113) 0.5 (1.0) K0377184
Thermal switch (set at 300 °F/147 °C) 0.5 (1.0) 642906025
Extended cold cap 0.5 (1.0) F6455001

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