ELSO Technologies Sdn Bhd
8E, First Floor,
Jalan Tun Dr. Awang,
Bukit Jambul,
11900 Bayan Lepas,
Penang, Malaysia.
+604-6301166
+604-6301167
+604-6301168
sales@elsotech.com

Mr Kwang (General Manager)
+6016-422 8644
 
+60164228644

Johor Branch
Lake View Apartment,
Jalan Austin Perdana 1,
Taman Austin Perdana,
81100 Johor Bahru,
Johor, Malaysia.

Chong CW (Sales Manager)
+6012-4767747
cwchong@elsotech.com

Selangor Branch
Puchong, Selangor.

Glenys Teoh (Sales Manager)
+6018-2810168
glenysteoh@elsotech.com

East Malaysia Branch
Lot 35, Lot 5277,
Lorong 9C1, Jalan Kapor,
93150 Kuching,
Sarawak, Malaysia.

Clement Lau (Sales Engineer)
+6019-8497663
clementlau@elsotech.com

ELSO Technologies Pte Ltd
Singapore Branch

1 Coleman Street
#10-06 The Adelphi
179803 Singapore.

Chew Peng Seng  (Sales Manager)
+65 9663 8176
pengseng@elsotech.com

TwisTorr 304 FS

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TwisTorr 304 FS Turbo Pumps Agilent Technologies


The Agilent TwisTorr 304 FS turbomolecular high-vacuum pump combines Twistorr drag stage technology and Agilent Floating Suspension to provide high performance, reliability and economy. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps.  This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension system reduces noise and vibration, and ensures optimal bearing operating conditions to extent operating life, minimize system downtime, and assure stable pumping performance over time.  The unique bearing and dry lubrication in the TwisTorr 304 FS eliminate oil and maintenance, and permit operation of the pump in any orientation. Available with on-board or rack controllers.

Features

  • Innovative TwisTorr technology - High compression ratio for light gases and very compact rotor design provides high performance and minimal system footprint.
  • High Foreline Tolerance - Permits use of smaller backing pump, thereby reducing system cost and size.
  • Agilent Floating Suspension - Low vibration and acoustical noise, optimal bearing working conditions, extended operating life all optimize cost-of-ownership, minimize system downtime, and assure stable performance over time.
  • Unique bearing & dry lubrication - Maintenance free, oil free; allows installation in any orientation.
  • Copper water cooling channel (optional) - Eliminates corrosion risk and optimizes heat transfer, and reduce water consumption and cost-of-ownership.
Technical Specifications
 
Pumping speed ISO 100 / CF 6” ISO 160 / CF 8”
N2 250 l/s 250 l/s
He 255 l/s 255 l/s
H2 220 l/s 220 l/s
Ar 250 l/s 250 l/s
Gas throughput at full rotational speed(with recommended forepump) Ambient Temp.
(25°C)
Water Temp.
(25°C, 50 l/h)
N2 170 sccm 170 sccm
Ar 110 sccm 110 sccm
Compression ratio & Foreline Tolerance
N2 > 1 x 1011 >10 mbar
He > 1 x 108 >10 mbar
H2 1.5 x 106 >4 mbar
Ar > 1 x 1011 >10 mbar
Base pressure with recommended forepump (5 m3/h) < 1 x 10-10 mbar  (< 1 x 10-10 Torr)
Inlet flange CFF 8” O.D. ISO 160
  CFF 6” O.D. ISO 100
Foreline flange KF16 NW (KF25 - optional)
Rotational speed 60000 rpm (1010 Hz driving frequency)
Start-up time < 3 minutes
Recommended forepump mechanical: Agilent DS 102
  dry pump: Agilent SH 110
Operating position Any
Operating ambient temperature +5 °C to +35 °C
Relative humidity of air 0 - 90 % (not condensing)
Bakeout temperature 80 °C at inlet flange max (ISO flange)
  120 °C at inlet flange max (CFF flange)
Lubricant Permanent lubrication
Cooling requirements Forced air (5- 35 °C ambient temperature)
  Water (mandatory if ambient temperature > 35 °C)
Coolant water Minimum flow: 50 l/h (0.89 GPM)
  Temperature: +15 °C to +30 °C
  Pressure: 3 to 5 bar (45 to 75 psi)
Noise Pressure level < 50 dB(A) at 1 meter
Storage temperature -40° C to +70° C
Max altitude 3000 m
Weight kg (lbs) Pump ISO 100 5.5 kg (12.3)
  Pump CFF 6’’ 7.5 kg (16.5)
  Pump ISO 160 5.7 kg (12.6)
  Pump CFF 8’’ 9.7 kg (20.9)

Outline Drawing ISO 100
TwistTorr 304 FS ISO 100 Turbo Pump Outline Drawing
Outline Drawing CF 6”
TwistTorr 304 FS CF 6Ħħ Turbo Pump Outline Drawing

Ordering Details
  Description Part Number
Pumps TwisTorr 304 FS Turbo Pump, ISO100, water cooled X3500-64000
TwisTorr 304 FS Turbo Pump, CFF6, water cooled X3500-64001
TwisTorr 304 FS Turbo Pump, ISO160, water cooled X3500-64002
TwisTorr 304 FS Turbo Pump, CFF8, water cooled X3500-64003
TwisTorr 304 FS Turbo Pump, ISO100 X3500-64004
TwisTorr 304 FS Turbo Pump, CFF6 X3500-64005
TwisTorr 304 FS Turbo Pump, ISO160 X3500-64006
TwisTorr 304 FS Turbo Pump, CFF8 X3500-64007
TwisTorr 304 FS SF Split Flow Turbo Pump, ISO100, water cooled X3500-64010
Controllers TwisTorr 304 FS Onboard controller, 24Vdc X3507-64002
TwisTorr 304 FS Onboard controller, 100-240Vac X3507-64003
TwisTorr 304 FS AG rack controller with RS232/485 X3506-64002
TwisTorr 304 FS AG rack controller with Profibus X3506-64003
Accessories Mains cable NEMA Plug, 3m long 969-9958
Mains cable European Plug, 3m long 969-9957
Serial cable and T-Plus Software 969-9883
Inlet screen, ISO 100 X3500-68000
Inlet screen CFF 6’’ 969-9302
Inlet screen, ISO 160 X3500-68001
Inlet screen CFF 8’’ 969-9304
Water cooling kit 969-9337
Plastic water cooling kit 969-9347
Air cooling kit for On-board Controller X3500-68010
Fan extension cable, On-board controller 969-9949
Fan extension cable, rack AG controller 969-9940
Air cooling kit for Rack AG Controller X3500-68011
Bracket for On-Board Controller side mounting X3500-68012
Foreline flange KF25 1/4 gas 969-9130
Purge valve 10 SCCM ¼ Swagelok – ¼ Swagelok 969-9232
Purge valve 10 SCCM ¼ Swagelok – M12 969-9240
Purge valve 10 SCCM NW16KF – M12 969-9239
Purge valve 20 SCCM ¼ Swagelok – ¼ Swagelok 969-9236
Purge valve 20 SCCM ¼ Swagelok – M12 969-9242
Purge valve 20 SCCM NW16KF – M12 969-9241
Vent device with adjustable delay time (110-220V) X3505-68000
Vent flange, NW 10 KF / M8 969-9108
Vent valve for AG Rack Controller 969-9844
Vent valve for on-board Controller 969-9834
Vibration damper, ISO 100 IDX 969-9396
Vibration damper, CF 6" 969-9334
Vibration damper, CF 8" 969-9335
Vibration damper, ISO 100 969-9344
Vibration damper, ISO 160 969-9345
Active Gauges Ask Agilent for details
 
 

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