ELSO Technologies Sdn Bhd
8E, First Floor,
Jalan Tun Dr. Awang,
Bukit Jambul,
11900 Bayan Lepas,
Penang, Malaysia.
+604-6301166
+604-6301167
+604-6301168
sales@elsotech.com

Mr Kwang (General Manager)
+6016-422 8644
 
+60164228644

Johor Branch
Lake View Apartment,
Jalan Austin Perdana 1,
Taman Austin Perdana,
81100 Johor Bahru,
Johor, Malaysia.

Chong CW (Sales Manager)
+6012-4767747
cwchong@elsotech.com

Selangor Branch
Puchong, Selangor.

Glenys Teoh (Sales Manager)
+6018-2810168
glenysteoh@elsotech.com

East Malaysia Branch
Lot 35, Lot 5277,
Lorong 9C1, Jalan Kapor,
93150 Kuching,
Sarawak, Malaysia.

Clement Lau (Sales Engineer)
+6019-8497663
clementlau@elsotech.com

ELSO Technologies Pte Ltd
Singapore Branch

1 Coleman Street
#10-06 The Adelphi
179803 Singapore.

Chew Peng Seng  (Sales Manager)
+65 9663 8176
pengseng@elsotech.com

Turbo-V 2K-G

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Turbo-V 2K-G Turbo Pumps Agilent Technologies


The Turbo-V 2K-G is more than a pump. It is a dedicated pumping system, designed specifically for the plasma process industry. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon gas and very high temperatures. Additionally, it features built-in control electronics, an integrated vent and purge valve, and maintenance-free bearings. All of these assets make the Agilent Turbo-V 2K-G the optimum pumping solution for the coating industry.

Features

  • The first application-specific pumping solution designed for thin film deposition equipment
  • The highest performing, most compact unit available
  • The first fully integrated approach for maximum system productivity and uptime
  • Integrated package includes Turbo Molecular Pump, Drive Electronics, Power Supply, MoniTorr, Purge Gas and Communication
  • Versatile electronics interface with easy to use control Software Analog I/O signals and RS232 / RS485 interface as standard
  • Agilent Profibus interface (optional)
  • Utilizes Agilent's T-plus Software
  • Typical Turbo Pump Applications
  • Ordering Details
Tech Specs

 

Pumping speed N2: 1600 l/s
Compression ratio N2: 3 x 105
Base pressure* (with minimum recommended forepump) <1 x 10-8 mbar
Inlet flange ISO 250 F
Foreline flange KF40 NW
Rotational speed 33,000 rpm
Start-up time < 7 minutes
Recommended forepump > 40 m3/h
Operating position Any
Operating ambient temperature +5 °C to +40 °C
Power supply Input voltage 100 - 240 Vac
Input frequency 50 – 60 Hz
Communication Interface Analogue I/O Standard
RS232 / RS485 Standard
Profibus Optional
Dimensions Height 335 mm
Diameter 335 mm
Weight 35 kg

 

*According to standard DIN 28 428

 

Description Part Number
Turbo-V 2K-G Systems  
Turbo-V 2K-G system with MoniTorr 9698871
Turbo-V 2K-G system with Profibus and MoniTorr 9698873
Mains cable NEMA Plug, 3m long 9699958
Mains cable European Plug, 3m long 9699957
Serial cable and Navigator Software 3.0 9699883
MoniTorr connectivity kit 9699260
Remote Assist Support program 12 Months RASS2KG_1YR
Remote Assist Support program 24 Months RASS2KG_2YR
Inlet screen ISO 250 with center ring 9699138
Water cooling kit for 6x8 (IDxOD) flexible tube 9699348
Water cooling kit for 3/8 in. ID flexible tube 9699338
Water hoses 9699825

 

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