ELSO Technologies Sdn Bhd
8E, First Floor,
Jalan Tun Dr. Awang,
Bukit Jambul,
11900 Bayan Lepas,
Penang, Malaysia.
+604-6301166
+604-6301167
+604-6301168
sales@elsotech.com

Mr Kwang (General Manager)
+6016-422 8644
 
+60164228644

Johor Branch
Lake View Apartment,
Jalan Austin Perdana 1,
Taman Austin Perdana,
81100 Johor Bahru,
Johor, Malaysia.

Chong CW (Sales Manager)
+6012-4767747
cwchong@elsotech.com

Selangor Branch
Puchong, Selangor.

Glenys Teoh (Sales Manager)
+6018-2810168
glenysteoh@elsotech.com

East Malaysia Branch
Lot 35, Lot 5277,
Lorong 9C1, Jalan Kapor,
93150 Kuching,
Sarawak, Malaysia.

Clement Lau (Sales Engineer)
+6019-8497663
clementlau@elsotech.com

ELSO Technologies Pte Ltd
Singapore Branch

1 Coleman Street
#10-06 The Adelphi
179803 Singapore.

Chew Peng Seng  (Sales Manager)
+65 9663 8176
pengseng@elsotech.com

TwisTorr 84 FS

Previous 17 / 17 Next

TwisTorr 84 FS Turbo Pumps Agilent Technologies


Features

  • Innovative TwisTorr technology - High compression ratio for light gases and very compact rotor design provides high performance and minimal system footprint.
  • High Foreline Tolerance - Permits use of smaller backing pump, thereby reducing system cost and size.
  • Agilent Floating Suspension - Low vibration and acoustical noise, optimal bearing working conditions, extended operating life all optimize cost-of-ownership, minimize system downtime, and assure stable performance over time.
  • Unique bearing & dry lubrication - Maintenance free, oil free; allows installation in any orientation.
  • Copper water cooling channel (optional) - Eliminates corrosion risk and optimizes heat transfer, and reduces water consumption and cost of ownership.

Specifications

Pumping speed KF 40 CFF 2.75" ISO 63 / CFF 4.5”
Ar 44 l/s 57 l/s 66 l/s
N2 49 l/s 56 l/s 67 l/s
He 38 l/s 46 l/s 63 l/s
H2 36 l/s 40 l/s 53 l/s
Gas throughput at full rotational speed
 (with recommended forepump)
Air cooling (25°C) Water cooling (25°C, 65 l/h)
N2 100 sccm 100 sccm
Ar 70 sccm 70 sccm
Compression ratio & Foreline tolerance Compression ratio Foreline tolerance
Ar > 1.0 x 1011 > 14 mbar
N2 ≥ 1.0 x 1011 > 14 mbar
He 2.0 x 106 > 12 mbar
H2 5.0 x 104 > 4 mbar
Base pressure with recommended forepump (5 m3/h) < 8.0 x 10-10 mbar (< 6.0 x 10-10  Torr)
Inlet flange   CFF 4.5”, ISO 63
CFF 2.75”, KF 40
Foreline flange KF16
Rotational speed 81,000 rpm (1350 Hz driving frequency)
Start-up time < 2 minutes
Recommended forepump   Mechanical: Agilent DS-42/102
Dry pump: Agilent SH-110/IDP-3
Operating position Any
Operating ambient temperature 5 °C to 35 °C
Relative humidity of air 0 - 90 % (not condensing)
Bakeout temperature 80°C at inlet flange max (ISO flange)
120°C at inlet flange max (CFF flange)
Lubricant Permanent lubrication
Cooling requirements Air flow temperature: (5 to 35 °C ambient)
Water (mandatory if ambient temperature > 35 °C):
Water temperature: 15 °C to 25 °C
Minimum flow: 65 l/h (0.30 GPM)
Pressure: 2 to 4 bar (45 to 75 psi)
Noise pressure level < 40 dB(A) at 1 meter, full speed
Storage temperature -40° C to 70° C
Max altitude 3000 m
Weight kg (lbs) Pump ISO 63 2.05 kg
  Pump CFF 4.5” 3.50kg
  Pump CFF 2.75” 3.34kg
  Pump KF 40” 2.37kg
Conformity to Norms EMC 61326-1
  Safety (CE/CSA) Regulatory DIR 2006/42/CE
  ROHS DIR 2011/65/EU
 

Ordering Details

 

Pumps Part Number
TwisTorr 84FS, ISO63 X3502-64000
TwisTorr 84FS, KF40 X3502-64001
TwisTorr 84FS, CFF 4.5” X3502-64002
TwisTorr 84FS, CFF 2.75” X3502-64003

 

Controllers Part Number
TwisTorr 84FS on-board controller, 110/220V X3509-64000
TwisTorr 84FS on-board controller, 24V X3509-64001
TwisTorr 84FS AG rack controller, RS232/485 X3508-64001
TwisTorr 84FS AG rack controller, Profibus X3508-64002
TwisTorr 84FS PCB controller X3510-64000

 

Accessories

Cables Part Number
Mains cable, NEMA plug, 3 m long 969-9958
Mains cable, European plug, 3 m long 969-9957
Serial cable and T-plus software 969-9883
Extension cable, 5 m 929-9942M007
Extension cable, 10 m 929-9942M006
Extension cable, 15 m 929-9942M005
Extension cable, 20 m 929-9942M004

 

Inlet Screens Part Number
Inlet screen, ISO63 X3502-68001
Inlet screen, CFF 4.5” X3502-68000
Inlet screen, KF40 969-9309
Inlet screen, CFF 2.75” 969-9328

 

Cooling Kits Part Number
Metal Water cooling Kit X3502-68002
Plastic Water cooling kit X3502-68003
Air cooling kit (0,5 m cable) 969-9290
Air cooling kit extension cable (5 m) 969-9240

 

Vibration Isolator Part Number
Vibration isolator, ISO 63 969-9375
Vibration isolator, CFF 4.5” 969-9376

 

Venting Part Number
Vent Valve, Normally Open, 0.5 mm orifice (0.5 m cable) 969-9844
Vent Valve extension cable (5 m) 969-9841
Vent Valve extension cable (10 m) 969-9941M003 969-9941M003
Vent Valve extension cable (15 m) 969-9941M001 969-9941M001
Vent Valve extension cable (20 m) 969-9941M005 969-9941M005
Vent Screw, M5 X3502-68005

 

Purge Part Number
Purge Screw X3502-68004
Purge valve, 10 SCCM, NW16KF - M12 9699239
Purge valve, 10 SCCM, ¼ Swagelok - M12 9699240
Purge valve, 20 SCCM, NW16KF - M12 9699241
Purge valve, 20 SCCM, ¼ Swagelok - M12 9699242
Purge valve, 10 SCCM, ¼ Swagelok - ¼ Swagelok 9699232
Purge valve, 20 SCCM, ¼ Swagelok - ¼ Swagelok 9699236

 

Mounting Part Number
Controller side mounting bracket X3502-68006
Mounting kit, CFF 4.5” X3502-68007
Metric screws kit X3502-68008
American screws kit X3502-68009
Pump extension cable (3 m) 969-9942

 

 

Active Gauges Part Number
FRG 700 Full Range Gauge Visit Agilent.com
PVG 500 Pirani Vacuum Gauge Visit Agilent.com
PCG 750 Pirani Capacitance Gauge Visit Agilent.com
CDG-500 Capacitance Diaphragm Visit Agilent.com


Please leave your enquiry here, we will reply as soon as possible.
Name*  
Company Name  
Product Interested  
Quantity  
Email*  
Contact No.*  
Ship to Name  
Shipping Address  
Messages*  
   

Switch to Mobile Version
available in