Trek 646 Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±3 kV

Trek 646 Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±3 kV

Trek 646 Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±3 kV

Category: E-Chuck Supplies

Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±3 kV

Advanced Energy’s Trek 646 software-driven electrostatic chuck supply offers versatility and performance for use in multiple processes.

  • Output Phasing: 0 to ±3 kV
  • Output Voltage Range: 0 to ±3 kV
  • Output Current Range: 0 to ±6.5 mADC with a peak capability of 10 mA